Microsensors MEMS and smart devices 1st Edition by Julian Gardner, Vijay Varadan, Osama Awadelkarim 047186109X 9780471861096

Microsensors MEMS and smart devices 1st Edition by Julian Gardner, Vijay Varadan, Osama Awadelkarim- Ebook PDF Instant Download/Delivery: 047186109X, 9780471861096

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Product details:

ISBN 10: 047186109X

ISBN 13: 9780471861096

Author: Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim

Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called “system-on-a-chip” combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle.
Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices.
Features include:
* Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods.
* Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines.
* Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin.
* An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology.
* Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field.
Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.

Microsensors MEMS and smart devices 1st Table of contents:

CHAPTER 1: Introduction

CHAPTER 2: Electronic Materials and Processing

CHAPTER 3: MEMS Materials and their Preparation

CHAPTER 4: Standard Microelectronic Technologies

CHAPTER 5: Silicon Micromachining: Bulk

CHAPTER 6: Silicon Micromachining: Surface

CHAPTER 7: Microstereolithography for MEMS

CHAPTER 8: Microsensors

CHAPTER 9: Introduction to SAW Devices

CHAPTER 10: Surface Acoustic Waves in Solids

CHAPTER 11: IDT Microsensor Parameter Measurement

CHAPTER 12: IDT Microsensor Fabrication

CHAPTER 13: IDT Microsensors

CHAPTER 14: MEMS-IDT Microsensors

CHAPTER 15: Smart Sensors and MEMS

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Julian Gardner,Vijay Varadan,Osama Awadelkarim,Microsensors