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CMOS MEMS Advanced Micro and Nanosystems 1st Edition by Henry Baltes, Oliver Brand, Gary Fedder, Christofer Hierold, Jan Korvink, Osamu Tabata 9783527310807 3527310800

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CMOS MEMS Advanced Micro and Nanosystems 1st Edition Henry Baltes Digital Instant Download

Author(s): Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
ISBN(s): 9783527310807, 3527310800
Edition: 1
File Details: PDF, 6.63 MB
Year: 2005
Language: english
SKU: EB-2201064 Category: Tags: , , , , ,

CMOS MEMS Advanced Micro and Nanosystems 1st Edition by Henry Baltes, Oliver Brand, Gary Fedder, Christofer Hierold, Jan Korvink, Osamu Tabata – Ebook PDF Instant Download/Delivery: 9783527310807, 3527310800

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Product details:

ISBN 10: 3527310800

ISBN 13: 9783527310807

Author: Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata

This edition of ‘CMOS-MEMS’ was originally published in the successful series ‘Advanced Micro & Nanosystems’. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of
MEMS is covered from all angles.

The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS – a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first
place, rather than having a hybrid solution.

Table of contents:

Chapter 1: Fabrication Technology

Chapter 2: Material Characterization

Chapter 3: Monolithically Integrated Inertial Sensors

Chapter 4: CMOS–MEMS Acoustic Devices

Chapter 5: RF CMOS MEMS

Chapter 6: CMOS-Based Pressure Sensors

Chapter 7: CMOS-Based Chemical Sensors

Chapter 8: Biometric Capacitive CMOS Fingerprint Sensor Systems

Chapter 9: CMOS-Based Biochemical Sensing Systems

Chapter 10: CMOS-Based Thermal Sensors

Chapter 11: Circuit and System Integration

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Tags: Henry Baltes, Oliver Brand, Gary Fedder, Advanced