MEMS Mechanical Sensors 1st Edition by Stephen Beeby, Graham Ensell, Michael Kraft, Neil White 1580535364 9781580535366

MEMS Mechanical Sensors 1st Edition by Stephen Beeby, Graham Ensell, Michael Kraft, Neil White – Ebook PDF Instant Download/Delivery: 1580535364, 9781580535366

Full download MEMS Mechanical Sensors 1st Edition after payment

Product details:

ISBN 10: 1580535364

ISBN 13: 9781580535366

Author: Stephen Beeby, Graham Ensell, Michael Kraft, Neil White

Here’s the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing. This new resource explores all the major areas of mechanical microsensors and takes an especially close look at pressure and inertial sensors. Engineers in industry and academia can tap into current and future market trends in such key applications areas for mechanical microsensors as force and torque, flow in microfluidics, and displacement. A thorough introduction to physical sensors, MEMS, and the properties of silicon brings you up to speed with the state of the art of this groundbreaking technology.

MEMS Mechanical Sensors 1st Table of contents:

1 Introduction

1.1 Motivation for the Book

1.2 What Are MEMS?

1.3 Mechanical Transducers

1.4 Why Silicon?

1.5 For Whom Is This Book Intended?

References

2 Materials and Fabrication Techniques

2.1 Introduction

2.2 Materials

2.3 Fabrication Techniques

References

3 MEMS Simulation and Design Tools

3.1 Introduction

3.2 Simulation and Design Tools

References

4 Mechanical Sensor Packaging

4.1 Introduction

4.2 Standard IC Packages

4.3 Packaging Processes

4.4 MEMS Mechanical Sensor Packaging

4.5 Conclusions

References

5 Mechanical Transduction Techniques

5.1 Piezoresistivity

5.2 Piezoelectricity

5.3 Capacitive Techniques

5.4 Optical Techniques

5.5 Resonant Techniques

5.6 Actuation Techniques

5.7 Smart Sensors

References

6 Pressure Sensors

6.1 Introduction

6.2 Physics of Pressure Sensing

6.3 Traditional Pressure Sensors

6.4 Diaphragm-Based Pressure Sensors

6.5 MEMS Technology Pressure Sensors

6.6 Microphones

6.7 Conclusions

References

7 Force and Torque Sensors

7.1 Introduction

7.2 Silicon-Based Devices

7.3 Resonant and SAW Devices

7.4 Optical Devices

7.5 Capacitive Devices

7.6 Magnetic Devices

7.7 Atomic Force Microscope and Scanning Probes

7.8 Tactile Sensors

7.9 Future Devices

References

8 Inertial Sensors

8.1 Introduction

8.2 Micromachined Accelerometer

8.3 Micromachined Gyroscopes

8.4 Future Inertial Micromachined Sensors

References

9 Flow Sensors

9.1 Introduction to Microfluidics and Applications for Micro Flow Sensors

9.2 Thermal Flow Sensors

9.3 Pressure Difference Flow Sensors

9.4 Force Transfer Flow Sensors

9.5 Nonthermal Time of Flight Flow Sensors

9.6 Flow Sensor Based on the Faraday Principle

9.7 Flow Sensor Based on the Periodic Flapping Motion

9.8 Flow Imaging

9.9 Optical Flow Measurement

9.10 Turbulent Flow Studies

9.11 Conclusion

People also search for MEMS Mechanical Sensors 1st: 

mems sensor technology

mems sensors

 mems sensor meaning

 mems pressure sensor

Tags:

Stephen Beeby,Graham Ensell,Michael Kraft,Neil White,Mechanical