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Optical Imaging in Projection Microlithography 1st Edition by Alfred Kwok Kit Wong 0819458295 9780819458292

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Optical Imaging in Projection Microlithography Alfred Kwok-Kit Wong Digital Instant Download

Author(s): Alfred Kwok-Kit Wong
ISBN(s): 9780819458292, 0819458295
Edition: illustrated edition
File Details: PDF, 9.05 MB
Year: 2005
Language: english
SKU: EB-2091086 Category: Tag:

Optical Imaging in Projection Microlithography 1st Edition by Alfred Kwok Kit Wong – Ebook PDF Instant Download/Delivery: 0819458295, 9780819458292

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Product details:

ISBN 10: 0819458295 

ISBN 13: 9780819458292

Author: Alfred Kwok Kit Wong

Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.

Table of contents:

Basic Electromagnetism

Elements of Geometrical Optics

Elements of Diffraction Theory

Imaging of Extended Objects with Finite Sources

Resolution and Image Enhancement

Oblique Rays

Aberrations

Numerical Computation

Variabilities

Appendix A: Birefringence

Appendix B: Stationarity and Ergodicity

Appendix C: Some Zernike Polynomials

Appendix D: Simulator Accuracy Tests

Appendix E: Select Refractive Indexes

Appendix F: Assorted Theorems and Identities

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Tags: Alfred Kwok Kit Wong, Optical, ImagingMicrolithography