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The MEMS Handbook 1st Edition by Mohamed Gad El Hak 0849300770 9780849300776

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The MEMS Handbook 1st Edition Mohamed Gad-El-Hak Digital Instant Download

Author(s): Mohamed Gad-el-Hak
ISBN(s): 9780849300776, 0849300770
Edition: 1
File Details: PDF, 66.93 MB
Year: 2002
Language: english
SKU: EB-921924 Category: Tag:

The MEMS Handbook 1st Edition by Mohamed Gad El Hak – Ebook PDF Instant Download/Delivery: 0849300770, 9780849300776

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ISBN 10: 0849300770

ISBN 13: 9780849300776

Author: Mohamed Gad-El-Hak

The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today’s engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS.

The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.

Table of contents:

Part I: Background and Fundamentals

1.Introduction

2. Scaling of Micromechanical Devices

3. Mechanical Properties of MEMS Materials

4. Flow Physics

5. Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains

6. Liquid Flows in Microchannels

7. Burnett Simulations of Flows in Microdevices

8. Molecular-Based Microfluidic Simulation Models

9. Lubrication in MEMS

10. Physics of Thin Liquid Films

11. Bubble/Drop Transport in Microchannels

12. Fundamentals of Control Theory

13. Model-Based Flow Control for Distributed Architectures

14. Soft Computing in Control

Part II: Design and Fabrication

15. Materials for Microelectromechanical Systems

16. MEMS Fabrication

17. LIGA and Other Replication Techniques

18. X-Ray-Based Fabrication

19. Electrochemical Fabrication (EFAB)

20. Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS

21. Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide

22. Microfabricated Chemical Sensors for Aerospace Applications

23. Packaging of Harsh-Environment MEMS Devices

Part III: Applications of MEMS

24. Inertial Sensors

25. Micromachined Pressure Sensors

26. Sensors and Actuators for Turbulent Flows

27. Surface-Micromachined Mechanisms

28. Microrobotics

29. Microscale Vacuum Pumps

30. Microdroplet Generators

31. Micro Heat Pipes and Micro Heat Spreaders

32. Microchannel Heat Sinks

33. Flow Control

Part IV: The Future

34. Reactive Control for Skin-Friction Reduction

35. Towards MEMS Autonomous Control of Free-Shear Flows

36. Fabrication Technologies for Nanoelectromechanical Systems

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